VLSI Technology (B.Tech)

Departmental Elective-III: crystal growth, oxidation, lithography, diffusion and IC fabrication.

6 MonthsDuration 5Chapters25Topics

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Syllabus · पाठ्यक्रम

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01Unit 1: Crystal Growth and Wafer Preparation 5 topics

Electronic-grade silicon (Siemens process)
Czochralski crystal growth
Float-zone method
Crystal defects and doping uniformity
Wafer shaping, slicing, polishing and cleaning

02Unit 2: Oxidation and Epitaxy 5 topics

Dry and wet thermal oxidation
Deal-Grove model of oxidation kinetics
Oxide properties and charges
Vapour-phase epitaxy and molecular beam epitaxy
CVD of polysilicon, nitride and oxide

03Unit 3: Lithography and Etching 5 topics

Photolithography process steps
Positive and negative photoresists
Contact, proximity and projection printing; resolution
E-beam and X-ray lithography
Wet etching and dry (plasma, RIE) etching

04Unit 4: Diffusion and Ion Implantation 5 topics

Fick's laws of diffusion
Constant-source and limited-source diffusion profiles
Diffusion length and junction depth
Ion implantation: range, straggle and annealing
Comparison of diffusion and implantation

05Unit 5: Metallization and IC Process Integration 5 topics

Aluminium and copper interconnects
Electromigration and junction spiking
Device isolation: LOCOS and shallow trench isolation
NMOS and twin-tub CMOS process flow
Packaging and yield

About

You will be able to

Describe the preparation of electronic-grade silicon and single-crystal wafers
Explain thermal oxidation and epitaxy and calculate oxide growth with the Deal-Grove model
Explain photolithography, resists and etching and estimate the resolution of an exposure system
Calculate diffusion profiles and compare diffusion with ion implantation
Describe metallization, isolation and the sequence of steps of a CMOS process
Relate each fabrication step to device performance and yield

Who it is for

B.Tech Electronics & Communication Engineering students of Semester 6 (AKTU)
B.Tech EE / EI students who take this subject as an elective
Students preparing for GATE ECE who want to revise this subject

What you need

Semiconductor devices and basic electronics (Semesters 3-4)
Basic chemistry and physics of semiconductors

Questions

Which syllabus does the VLSI Technology course follow?

It follows the current AKTU B.Tech (ECE) scheme, Semester 6. If your university or college uses a different scheme, the centre follows your own university syllabus.

Do you cover numericals and previous year questions?

Yes. Each unit is taught with solved numericals and AKTU previous-year questions.

Is this course theory only?

Yes, it is a theory elective; process flows are explained with diagrams drawn in class.